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Wafer-Level Processing

Wafer in. Interposer out.

Wafer-level patterning, vias, deposition, etch, CMP, and RDL on one floor — so you iterate interposers and test vehicles in days, not a full-fab queue.

/ Maskless & direct-write / Si · sapphire · quartz · compound / TSV & RDL / US-soil

3D silicon interposer with through-silicon vias and redistribution routing built at Heisler Semiconductor

What we run

The wafer-level stack, end to end.

Every step that turns a blank wafer into a routed interposer or test vehicle, under one roof — no shuttle between vendors, no lost weeks at each handoff.

  • 01Direct-write lithography & maskless patterning — no mask set, no NRE wait between design spins
  • 02Via formation, TSV and non-TSV — through-silicon and blind/buried vias for vertical interconnect
  • 03Deposition — PVD, CVD, and ALD for seed, barrier, dielectric, and conformal films
  • 04Etch — plasma, gas-phase, and wet chemistries for features, release, and via reveal
  • 05Grinding & CMP — thinning and planarization to target thickness and surface finish
  • 06RDL — redistribution routing to fan signals out to package-level pitch

Step-level recipes, film stacks, and design rules shared under NDA.

A full fab move-in to prove one idea?

Most wafer-level work stalls because each step lives at a different vendor. A litho spin waits on a mask house; a TSV etch waits in someone else's queue. Weeks evaporate between steps, not inside them.

We hold the whole flow in one place, so a design change closes in a single pass instead of a round-trip. Maskless patterning kills the mask-set wait on every spin. You get an interposer or test vehicle back fast enough to actually iterate on it — and the process that built it is documented, not improvised.

Substrates & targets

Wide material set. Hard targets.

Materials

Silicon

intrinsic & CMOS-compatible

Sapphire

hard, optically clear

Quartz /
fused silica

low-loss, RF & photonic

Compound

III–V & wide-bandgap

Applications

  • 01Silicon interposers — 2.5D routing between die
  • 02TSV test vehicles — via and stack qualification
  • 03WLP & fan-out — wafer- and panel-level packaging
  • 04Micro-fluidics, sensors & RF — etched channels, MEMS, low-loss passives

Substrate handling limits, thickness windows, and feature minimums confirmed against your design under NDA.

Proof

Process flows shared under NDA.

How we engage

Start with a test vehicle. Scale what works.

Send the structure you need built and the constraint you're fighting. We scope the flow, run a first wafer or test vehicle, and measure it before anyone talks volume.

One engineering team owns the wafer from patterning through RDL, so the result is traceable and repeatable — risk gets retired on the first build, not discovered at scale-up.

More capability

Where wafer-level connects.

/ Advanced Packaging / Laser Micromachining / Inspection & Metrology / Engineering & AI

Process More.

Bring us the wafer
that needs a faster loop.

One team, patterning through RDL. Request a capability brief for substrate limits, film stacks, design rules, and full process detail under NDA.

Request a Capability Brief

/ US-soil / Maskless / TSV & RDL